| 摘要 |
PROBLEM TO BE SOLVED: To configure a highly reliable visual inspection system that performs line illumination excellent in uniformity and eliminates failures, for example, a difference in appearance in an X-direction and a Y-direction on an irradiated surface.SOLUTION: A line illumination apparatus for performing line illumination C that is long in one direction comprises: a light source part 3o including one or two or more light emitting parts 3op ...; a front stage optical part 4o converting light Co emitted from the light source part 3o into parallel light Cp; a multiple light source forming part 5o converting the parallel light Cp emitted from the front stage optical part 4o into a plurality of line-shaped small light source parts 5s ... to form a multiple light source; and a back stage optical system 6 condensing each light Cps ... emitted from each of the small light source parts 5s ..., and converting the light into line illumination C with which the irradiated surface S is irradiated.SELECTED DRAWING: Figure 1 |
