发明名称 |
WORK CLAMP JIG AND WORK-PIECE POLISHING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a work clamp jig and a work-piece polishing method which prevent decrease in accuracy of torsion in row-bar polishing a magnetic head element bent due to a difference between thermal expansion coefficients of a circuit layer and a ceramic layer.SOLUTION: Polishing is performed without correcting a curved surface of a work-piece 3 by bringing one clamp tool 5A into contact with a circuit layer (lower end part) of the work-piece 3 using an elastic material 21, and supporting the work-piece 3 so as to bring the other clamp tool 5B into contact with a curved surface of a ceramic layer of the work-piece 3 by a projection part 20 and reciprocating the work-piece in a surface plate radial direction while being in contact with a rotating surface plate.SELECTED DRAWING: Figure 3 |
申请公布号 |
JP2016066393(A) |
申请公布日期 |
2016.04.28 |
申请号 |
JP20140193803 |
申请日期 |
2014.09.24 |
申请人 |
HITACHI INFORMATION & TELECOMMUNICATION ENGINEERING LTD |
发明人 |
MIYAZAKI SUGURU;IMAI KYOSUKE;OBUCHI HAJIME;MORIYA ATSUSHI |
分类号 |
G11B5/31;B24B41/06 |
主分类号 |
G11B5/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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