| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a continuous diffusion processing apparatus that can prevent a heating furnace from increasing in size due to a factor irrelevant to the size of a processing target even by using a construction which can continuously perform diffusion processing on the processing target. <P>SOLUTION: A continuous diffusion processing apparatus is provided with: a feeding table 50 on which plural plate-like processing targets are mounted; a barrel-type heating furnace 1 extending linearly; a feeding device 2 for successively feeding the feeding table 50 into the heating furnace 1 and feeding out the fed-in feeding table 50 from the heating furnace 1; a heating device 3 for heating the processing targets mounted on the feeding table 50; and a gas supply device 41 for supplying gas for diffusion processing into the heating furnace 1. The feeding device 2 pushes the feeding table 50 at the upstream side of a feed-in portion 11 to feed the feeding table 50 into the heating furnace 1, and also the fed-in feeding table 50 pushes a previously fed-in feeding table 50 to a feed-out portion 12 side, whereby feeding tables 50 are fed in a line into the heating furnace 1. <P>COPYRIGHT: (C)2012,JPO&INPIT |
