| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pulse laser machining apparatus that varies the shape of a pulse laser beam by use of a shaping aperture. <P>SOLUTION: The pulse laser machining apparatus includes: a reference clock oscillation circuit that generates a clock signal; a laser oscillator that emits a pulse laser beam synchronized with the clock signal; a laser beam scanner that scans the pulse laser beam in only one-dimensional direction in synchronization with the clock signal; a stage on which an object to be processed can be placed and that moves in a direction orthogonal to the one-dimensional direction; a pulse picker disposed in an optical path between the laser oscillator and the laser beam scanner to allow the pulse laser beam to pass or block it, in synchronization with the clock signal; a pulse picker control part that controls the pulse picker on the basis of the number of optical pulses of the pulse laser beam; and a shaping aperture disposed in the optical path between the pulse picker and the laser beam scanner to change the shape of the pulse laser beam. <P>COPYRIGHT: (C)2013,JPO&INPIT |
