Catalyst for decomposition of perfluorinated compound containing halogen acid gas, and preparation method thereof

摘要

The present invention provides a catalyst for the decomposition of a perfluorinated compound containing a halogen acid gas, and a preparation method thereof. According to the present invention, the Ru—P—Al tri-component catalyst for the decomposition of a perfluorinated compound shows an excellent decomposition activity and durability with respect to the decomposition and removal of a perfluorinated compound containing a halogen acid gas, and thus can be used to decompose a chamber cleaning gas, an etchant, a solvent and the like of a perfluorinated compound from the semiconductor manufacturing industry to the LCD processing field. In addition, the present invention can be useful for decomposing and removing a perfluorinated compound discharged in a process using a halogen acid gas such as F2, Cl2, Br2 and the like.

主权项

1. A Ru—P—Al tri-component catalyst to decompose perfluorinated compounds, comprising an aluminum oxide catalyst, and a promoter supported on a surface of the catalyst, the promoter comprising, relative to 1 weight of aluminum oxide catalyst, 0.05-0.3 part by weight of ruthenium (Ru) and 1.0-5.0 part by weight of phosphorus (P).