| 摘要 |
PROBLEM TO BE SOLVED: To provide an electromagnetic wave inspection device capable of inspecting crack and chip, even in the case where a plurality of contents are overlapped.SOLUTION: An inspection device in which, while conveying an article, an electromagnetic wave is irradiated thereto, and the article is inspected based on a transmission image of the article obtained by electromagnetic wave irradiation, includes: processing means for extracting an overlapping part of the article from the transmission image and a non-overlapping part, and for determining crack and chip based on the shape of the overlapping part; and processing means for determining crack and chip based on the shape of the non-overlapping part.SELECTED DRAWING: Figure 3 |
