| 摘要 |
PROBLEM TO BE SOLVED: To provide a production method for composite wiring, allowing the resistance to be decreased greatly, and allowing the structure to be strong.SOLUTION: On each carbon nanotube 16 formed inside a via hole 13 and containing successive benzene rings, CVD is performed using a metal complex 28 comprising a COD-Cu-hfac molecule.SELECTED DRAWING: Figure 1 |
