| 摘要 |
PROBLEM TO BE SOLVED: To highly efficiently perform neutralization even in a processing space.SOLUTION: In a neutralizing air generator, at least a pair of electrode devices (6) are arranged side by side with an interval therebetween within a plane crossing a flow line of supply air, in a neutralizing air supply passage (3) for supplying neutralizing air into a neutralizing processing chamber (1). Neutralizing air is generated by making a positive voltage act on one electrode device (6) and a negative electrode act on the other electrode device (6), respectively, and the generated neutralizing air is transported and supplied to the neutralizing processing chamber (1).SELECTED DRAWING: Figure 1 |
