LITHOGRAPHIC APPARATUS, POSITIONING SYSTEM FOR USE IN A LITHOGRAPHIC APPARATUS AND METHOD

摘要

A lithographic apparatus having a reference body and a positioning system, the positioning system including a main body; a reaction body; an actuator; and a controller. The main body is moveable relative to the reference body along a path in a first direction and a second opposite direction. The reaction body is moveable relative to the main body along a further path in the first and second directions and is moveably connected to the reference body to be moveable relative to the reference body in the first and second directions. The controller provides a first and a second signal to the actuator. The actuator is arranged between the main body and the reaction body to accelerate the main body in the first direction and to accelerate the reaction body in the second direction under control of the first signal, and to accelerate the main body in the second direction and to accelerate the reaction body in the first direction under control of the second signal. The controller determines when the reaction body moves in the second direction and to provide the second signal after the first signal to the actuator when the reaction body moves in the second direction along the further path.

主权项

1. A lithographic apparatus having a reference body and a positioning system, the positioning system comprising:
a main body; a reaction body; an actuator; and a controller; wherein the main body is moveable relative to the reference body along a path in a first direction and a second direction, wherein the first direction is opposite to the second direction, wherein the reaction body is moveable relative to the main body along a further path in the first direction and the second direction, wherein the reaction body is moveably connected to the reference body so as to be moveable relative to the reference body in the first direction and the second direction, wherein the controller is arranged to provide a first signal and a second signal to the actuator, wherein the actuator is arranged between the main body and the reaction body so as to accelerate the main body in the first direction and to accelerate the reaction body in the second direction under control of the first signal, and so as to accelerate the main body in the second direction and to accelerate the reaction body in the first direction under control of the second signal, wherein the controller is arranged to determine when the reaction body moves in the second direction, and wherein the controller is arranged to provide the second signal after the first signal to the actuator when the reaction body moves in the second direction along the further path.