PRETREATMENT OF TRANSPARENT CONDUCTIVE OXIDE (TCO) THIN FILMS FOR IMPROVED ELECTRICAL CONTACT

摘要

Certain embodiments relate to optical devices and methods of fabricating optical devices that pre-treat a sub-layer to enable selective removal of the pre-treated sub-layer and overlying layers. Other embodiments pertain to methods of fabricating an optical device that apply a sacrificial material layer.

主权项

1. A method of fabricating an optical device, the method comprising, in the following order:
(a) exposing a sub-layer of the optical device to an energy source; (b) depositing one or more material layers of the optical device on the sub-layer; and (c) ablating the one or more material layers and the sub-layer with a laser to expose an underlying layer.