发明名称 Electrical Connections for Chip Scale Packaging
摘要 Electrical connections for chip scale packaging are disclosed. In one embodiment, a semiconductor device includes a post-passivation layer disposed over a substrate, the substrate having a first direction of coefficient of thermal expansion mismatch. The semiconductor device includes a first opening through the post-passivation layer, the first opening comprising a plurality of elongated apertures. A longest of the plurality of elongated apertures comprises a first dimension, wherein the first dimension is aligned substantially perpendicular to the first direction of coefficient of thermal expansion mismatch.
申请公布号 US2016111363(A1) 申请公布日期 2016.04.21
申请号 US201514981569 申请日期 2015.12.28
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Chen Hsien-Wei;Liang Shih-Wei
分类号 H01L23/528;H01L23/00;H01L21/768;H01L23/532 主分类号 H01L23/528
代理机构 代理人
主权项 1. A device comprising: a substrate having a center region and having peripheral regions; a conductive line on the substrate; and a passivation layer formed on the conductive line, the passivation layer having a plurality of apertures exposing respective regions of the conductive line, a longest one of the plurality of apertures having a major axis extending in a direction along a major plane of the substrate, the direction being substantially perpendicular to a stress vector, the stress vector caused by a difference in a respective coefficients of thermal expansion between at least two materials on the substrate.
地址 Hsin-Chu TW