发明名称 |
Electrical Connections for Chip Scale Packaging |
摘要 |
Electrical connections for chip scale packaging are disclosed. In one embodiment, a semiconductor device includes a post-passivation layer disposed over a substrate, the substrate having a first direction of coefficient of thermal expansion mismatch. The semiconductor device includes a first opening through the post-passivation layer, the first opening comprising a plurality of elongated apertures. A longest of the plurality of elongated apertures comprises a first dimension, wherein the first dimension is aligned substantially perpendicular to the first direction of coefficient of thermal expansion mismatch. |
申请公布号 |
US2016111363(A1) |
申请公布日期 |
2016.04.21 |
申请号 |
US201514981569 |
申请日期 |
2015.12.28 |
申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Chen Hsien-Wei;Liang Shih-Wei |
分类号 |
H01L23/528;H01L23/00;H01L21/768;H01L23/532 |
主分类号 |
H01L23/528 |
代理机构 |
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代理人 |
|
主权项 |
1. A device comprising:
a substrate having a center region and having peripheral regions; a conductive line on the substrate; and a passivation layer formed on the conductive line, the passivation layer having a plurality of apertures exposing respective regions of the conductive line, a longest one of the plurality of apertures having a major axis extending in a direction along a major plane of the substrate, the direction being substantially perpendicular to a stress vector, the stress vector caused by a difference in a respective coefficients of thermal expansion between at least two materials on the substrate. |
地址 |
Hsin-Chu TW |