| 摘要 |
A flow rate measurement device of the present invention includes a flow rate signal detection unit for detecting a flow rate signal of a fluid to be measured flowing through flow path (1), flow rate calculation unit (11) for calculating a flow rate from the flow rate signal detected by the flow rate signal detection unit, and oscillation circuit (21) for generating a reference clock. Furthermore, the flow rate measurement device includes temperature calculation unit (22) for calculating a temperature from a frequency change resulting from a temperature change of oscillation circuit (21), and flow rate correction unit (23) for correcting the flow rate calculated by the flow rate calculation unit (11) by obtaining an offset flow rate at a desired temperature based on the temperature calculated by temperature calculation unit (22). Thus, accuracy of flow rate measurement can be improved. |
