Described herein are a method and apparatus for preparing trisilylamine. In one aspect, the method comprises: providing a reaction mixture of trisilylamine and monochlorosilane into a reactor wherein the reaction mixture is at a temperature and pressure sufficient to provide trisilylamine in a liquid phase wherein the reaction mixture is substantially free of an added solvent; contacting the reaction mixture with ammonia to provide a crude mixture comprising trisilylamine and an ammonium chloride solid wherein monochlorosilane is in stoichiometric excess in relation to ammonia; purifiying the crude mixture to provide trisilylamine wherein the trisilyamine is produced at purity level of 90% or greater; and optionally removing the ammonium chloride solid from the reactor.
申请公布号
EP3009396(A1)
申请公布日期
2016.04.20
申请号
EP20150193282
申请日期
2014.06.23
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
AGARWAL, RAJIV KRISHAN;LO, SAI-HONG ANDREW;WITHERS, JR., HOWARD PAUL;SLUZEVICH, JOSEPH T.;HART, JAMES JOSEPH