SHOWER HEAD FOR VAPOR DEPOSITION EQUIPMENT

摘要

Disclosed is a shower head for a vapor deposition device capable of depositing a thin film in a low temperature, when an OLED flexible display is manufactured. The shower head comprises: a plurality of through-holes placed in an inductively coupled plasma generation device; and a main gas provision unit. Accordingly, the shower head is configured to evenly distribute reaction gas to enhance a deposition distribution rate.