| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of inspecting a blanking device before the blanking device is mounted in a drawing device.SOLUTION: A blanking device inspecting method for inspecting a defective individual blanking mechanism of a blanking device containing plural individual blanking mechanism mounted in an array style for performing blanking control of beams, and at least one control circuit 43 that can selectively apply a positive potential and a ground potential to second electrodes of the plural individual blanking mechanisms, comprises a step of measuring a first current value flowing from a power source for supplying the voltage of the potential difference between the positive potential and the ground potential to each individual blanking mechanism under a state that the positive potential is applied from the control circuit 41 to the first electrode and the ground potential is applied from at least one control circuit 43 to the second electrode with respect to each individual blanking mechanism, and a step of determining that there exists an individual blanking mechanism in which short-circuit occurs when the measured fist current value is a finite value and is not more than a preset first threshold value.SELECTED DRAWING: Figure 3 |
