发明名称 SPECTROMETER
摘要 A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.
申请公布号 EP3004819(A2) 申请公布日期 2016.04.13
申请号 EP20140804678 申请日期 2014.07.31
申请人 MKS TECHNOLOGY INC. 发明人 WATSON, MARK;BULLER, SHANE;CARRON, KEITH
分类号 G01N21/65;G01J3/02;G01J3/44;G01N21/64;G02B21/00;G02B26/10 主分类号 G01N21/65
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