Apparatus for treating a plate-like member and method of treating the same

摘要

The present invention provides an apparatus for removing the unnecessary thin-film layer on the periphery of the substrate of the plate-like member having a square shape, on the surface of which substrate is formed a thin-film layer. The apparatus comprises a chamber to treat the peripheral part where the peripheral part of the plate-like member is inserted and where the unnecessary thin-film layer on the peripheral part of the plate-like member is removed; and a means to move the plate-like member. The chamber to treat the peripheral part comprises a cover to prevent the scattering of the sprayed particles and the dust for treating the peripheral part, the cover having one of its end-sides that forms a ceiling being closed and having the other end-side that is opposed to the ceiling being open and a suctioning cover for treating the peripheral part, having an opening that has the same shape as the opening of the cover to prevent the scattering of the dust. In the chamber to treat the peripheral part, a blasting nozzle for spraying particles for treating the peripheral part is disposed on the cover to prevent the scattering of the dust, so that the mouth of the blasting nozzle is covered by the wall of the cover to prevent the scattering of the sprayed particles and the dust.

主权项

1. An apparatus for removing an unnecessary thin-film layer on the periphery of a substrate of a plate-like member having a square shape, on the surface of which substrate is formed a thin-film layer, the apparatus for removing the unnecessary thin-film layer comprising:
a chamber to treat the peripheral part comprising an opening into which the peripheral part of the plate-like member is inserted and in which chamber the unnecessary thin-film layer on the peripheral part of the plate-like member is removed; and a means to move the plate-like member relative to a blasting nozzle for spraying particles that is disposed in the chamber to treat the peripheral part, wherein the chamber to treat the peripheral part comprises; a cover having end sides to prevent the scattering of the sprayed panicles and the dust for treating the peripheral part, the cover having one of its end sides that forms a ceiling being closed and having another end-side, which is opposed to the ceiling, being open; a blasting nozzle for spraying particles, which nozzle carries out the blasting treatment by spraying the particles on the surface of a workpiece, which is a plate-like member, the blasting nozzle for spraying particles for treating the peripheral part being disposed on the cover to prevent the scattering of the sprayed particles and the dust, so that the mouth of the blasting nozzle is covered by the wall of the cover to prevent the scattering of the dust; a suctioning cover for treating the peripheral part, having an opening that has the same shape as the opening of the cover to prevent the scattering of the sprayed particles and the dust; a suctioning member having end sides for treating the peripheral part, which member has a hollow center, having both end sides being kept open and the end sides each communicating with the suctioning cover for treating the peripheral part and a suctioning means; wherein the cover to prevent the scattering of the sprayed particles and the dust for treating the peripheral part and the suctioning cover for treating the peripheral part form a structure where their openings communicate with each other, and where the opening is formed, into which opening the peripheral part of the plate-like member is inserted, wherein, when the peripheral part of the plate-like member is inserted, the opening in the structure is formed so as to form gaps between the uppermost open end section of the opening and the surface of the workpiece and between the lowest open end section of the opening and the reverse surface of the workpiece, through which gaps outside air can be introduced, wherein a continuous hollow space is formed by the cover to prevent the scattering of the sprayed particles and the dust, being connected to the suctioning cover; wherein the cover to prevent the scattering of the sprayed particles and the dust, the suctioning cover, and the suctioning means that is connected to the suctioning member located at the bottom of the suctioning cover, each forms respective spaces that communicate with each other, and wherein the sprayed particles and the dust move toward the suctioning cover, because a suctioning means that is connected to the suctioning member suctions the outside aft that is introduced through the gaps.