| 发明名称 |
APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS |
| 摘要 |
An apparatus and a method of manufacturing a display apparatus are disclosed. In one aspect, the apparatus includes a chamber and an inorganic layer forming nozzle unit formed in the chamber and configured to form at least one inorganic layer. The apparatus also includes an organic layer forming nozzle unit formed in the chamber and configured to form at least one organic layer, wherein the organic layer forming nozzle unit is arranged substantially in line with the inorganic layer forming nozzle unit. The apparatus further includes a separating nozzle unit formed between the inorganic layer forming nozzle unit and the organic layer forming nozzle unit and configured to spray an inert gas. |
| 申请公布号 |
US2016097124(A1) |
申请公布日期 |
2016.04.07 |
| 申请号 |
US201514793562 |
申请日期 |
2015.07.07 |
| 申请人 |
Samsung Display Co., Ltd. |
发明人 |
Huh Myungsoo;Ko Dongkyun;Jang Choelmin;Kim Sungchul;Kim Inkyo;Roh Cheollae |
| 分类号 |
C23C16/455;C23C16/50 |
主分类号 |
C23C16/455 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus for manufacturing a display apparatus, the apparatus comprising:
a chamber; an inorganic layer forming nozzle unit formed in the chamber and configured to form at least one inorganic layer; an organic layer forming nozzle unit formed in the chamber and configured to form at least one organic layer, wherein the organic layer forming nozzle unit is arranged substantially in line with the inorganic layer forming nozzle unit; and a separating nozzle unit formed between the inorganic layer forming nozzle unit and the organic layer forming nozzle unit and configured to spray an inert gas. |
| 地址 |
Yongin-City KR |
