METHOD AND DEVICE FOR VACUUM LEAK TEST, AND MANUFACTURING METHOD FOR X-RAY TUBE

摘要

The present invention relates to a method to test a vacuum leakage of a plurality of X-ray tubes by a nondestructive method. The method to test the vacuum leakage of the X-ray tube comprises: a step of manufacturing the X-ray tube by a vacuum joining process using gas; and a step of mounting the X-ray tube in a test chamber, and detecting whether the gas exists in an exhaust material while ventilating inside the test chamber. If the gas exists in the exhaust material, the X-ray tube is determined to have a vacuum leakage. The present invention measures whether the gas used during the vacuum joining process has infiltrated into the X-ray tube to quickly test whether a vacuum leakage is present for a plurality of products by a nondestructive method. More specifically, since the present invention uses the nondestructive method to test whether a vacuum leakage is present, the vacuum joining process is able to again be performed on a product evaluated to have a vacuum leakage to recycle a product defective in the vacuum joining process into a good product.