发明名称 |
3D SEMICIRCULAR VERTICAL NAND STRING WITH SELF ALIGNED FLOATING GATE OR CHARGE TRAP CELL MEMORY CELLS AND METHODS OF FABRICATING AND OPERATING THE SAME |
摘要 |
A memory device includes a plurality of memory cells arranged in a string substantially perpendicular to the major surface of the substrate (10) in a plurality of device levels, at least one first select gate electrode located between the major surface of the substrate and the plurality of memory cells, at least one second select gate electrode located above the plurality of memory cells, a semiconductor channel (601) having a portion that extends vertically along a direction perpendicular to the major surface, a first memory film (54) contacting a first side of the semiconductor channel, and a second memory film (54) contacting a second side of the semiconductor channel. The second memory film is electrically isolated from the first memory film, and is located at a same level as the first memory film. |
申请公布号 |
WO2016053453(A1) |
申请公布日期 |
2016.04.07 |
申请号 |
WO2015US42220 |
申请日期 |
2015.07.27 |
申请人 |
SANDISK TECHNOLOGIES INC. |
发明人 |
KAI, JAMES K.;ZHANG, YANLI;CHIEN, HENRY;ALSMEIER, JOHANN;SEROV, ANDREY |
分类号 |
H01L27/115 |
主分类号 |
H01L27/115 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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