SALT, ACID GENERATOR, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a salt from which a resist pattern with good line edge roughness (LER) can be produced.SOLUTION: The salt has a group represented by formula (a). In formula (a), Xand Xeach independently represent an oxygen atom or a sulfur atom; Xrepresents a divalent group having an alicyclic hydrocarbon group, in which a methylene group included in the divalent group having an alicyclic hydrocarbon group may be replaced by an oxygen atom or a carbonyl group, and a hydrogen atom included in the divalent group having an alicyclic hydrocarbon group may be replaced by a hydroxy group or a fluorine tome; and * represents a binding site.SELECTED DRAWING: None