| 摘要 |
PROBLEM TO BE SOLVED: To make it easy to produce solid state devices.SOLUTION: The invention relates to a support for production of microelectronic, micro-optoelectronic or micromechanical devices. The support (10; 60) comprises a substrate (11; 61) having a function of a backing element, on the substrate, gas absorbing material is deposited in form of discrete deposits (13, 13',...; 63, 63',...) that are at least partially exposed to atmosphere present around the support (10; 60).SELECTED DRAWING: Figure 1 |
