Integrated piezoelectric resonator and additional active circuit

摘要

A semiconductor device comprises a semiconductor wafer; a piezoelectric resonator formed on the wafer, and an active circuit also formed on the wafer. The active circuit (e.g., a frequency divider) is electrically connected to the piezoelectric resonator.

主权项

1. A method of forming a semiconductor device comprising the steps of:
forming a piezoelectric resonator on a first portion of a semiconductor wafer by: depositing a first electrode; depositing a piezoelectric layer over the first electrode; and depositing a second electrode over the piezoelectric layer; forming an active circuit on a second portion of said wafer laterally adjacent to the first portion; and forming an electrical connection from the active circuit to said piezoelectric resonator, wherein the active circuit includes a frequency divider.