Beam profiler measuring intensity distribution of laser beam, laser oscillator, and laser processing device

摘要

A beam profiler which can determine whether or not a laser beam can be suitably output at a lower cost. The beam profiler is provided with a partial reflecting mirror, light receiving parts, and laser intensity sensors which are individually attached to the light receiving parts. The light receiving parts include a first light receiving part which receives a first region which includes an optical axis of the laser beam in a laser irradiation region of the laser beam and a second light receiving part which is insulated heat-wise from the first light receiving part and which receives a second region of a laser irradiation region which is different from the first region.

主权项

1. A beam profiler for measuring an intensity distribution of a laser beam, comprising:
a partial reflecting mirror; a plurality of light receiving parts receiving a laser beam passing through the partial reflecting mirror; and a plurality of laser intensity sensors individually attached to the plurality of light receiving parts and sensing the intensity of the laser beam received by the light receiving parts, wherein the plurality of light receiving parts at least includes:
a first light receiving part receiving a first region of a laser irradiation region of the laser beam, the first region having a center part of the laser beam; anda second light receiving part thermally-insulated from the first light receiving part and receiving a second region of the laser irradiation region which is different from the first region.