APPARATUS FOR ADJUSTING TRANSFER ARM AND APPARATUS FOR TRANSFERRING SUBSTRATE HAVING THE SAME

摘要

The present invention relates to a transfer arm adjustment apparatus, and a substrate transfer apparatus having the same. The transfer arm adjustment apparatus comprises: an adjustment unit coupled to a transfer arm to set an origin point of the transfer arm while the transfer arm to transfer a substrate is positioned in an adjustment position deviated from an overlapped position where the transfer arms are vertically overlapped; and a custom unit coupled to the transfer arm to set the original point of the transfer arm while the transfer arm is positioned in the adjustment position. According to the present invention, the present invention prevents the transfer arm from being adjusted while the transfer arms are overlapped in order to easily adjust a belt and a reducer positioned inside the transfer arm to easily adjust the transfer arm.