REGENERATIVE CIRCULATOR, HIGH FREQUENCY POWER SUPPLY, AND REGENERATION METHOD FOR HIGH FREQUENCY POWER

摘要

PROBLEM TO BE SOLVED: To suppress excessive voltage rise of a load voltage caused by impedance mismatching on a transmission line and to regenerate high frequency power.SOLUTION: When a voltage rises, parallel impedance is connected to a transmission line. Thus, a voltage generated by a standing wave is regenerated, an excessive voltage of a load voltage is reduced and utilization efficiency of energy is improved. Parallel impedance is configured for load impedance on the transmission line between a high frequency amplification circuit of a high frequency power source and a high frequency load. Thus, impedance at a connection position is reduced, the excessive voltage is prevented from being generated on the transmission line, and high frequency power is regenerated on the transmission line by the parallel impedance.SELECTED DRAWING: Figure 1