| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor element that is small in size and has high sensitivity, and a sensor device, electronic equipment and a mobile body including the sensor element and having high reliability.SOLUTION: A sensor element 2 includes a base part 21, a pair of vibration arms 221, 222 for drive, a pair of vibration arms 231, 232 for detection, a pair of vibration arms 241, 242 for adjustment, a first support part 251 and a second support part 252, and four beams 261, 262, 263, 264. The first support part 251 and the second support part 252 extend in a y-axis direction and are arranged as spaced apart from each other along an x-axis direction. A section including the first support part 251 and the beams 261, 262, and a section including the second support part 252 and the beams 263, 264 form closed rings to enclose a closed region 271 and a closed region 272.SELECTED DRAWING: Figure 2 |
