发明名称 LIGHTING OPTICAL DEVICE, EXPOSURE SYSTEM AND EXPOSURE METHOD
摘要 A light optical device capable of forming a bracelet-form lighting pupil distribution in a peripherally-polarized state with a light quantity loss satisfactorily controlled, the device comprising a light flux conversion element (50) for forming a bracelet-form light intensity distribution on a specified surface based on an incident light flux. The light flux conversion element comprises a first basic element (50A) formed of an optically-rotating material, for forming a first arcuate area distribution based on an incident light flux out of bracelet-form light intensity distribution, a second basic element (50B) for forming a second arcuate area distribution, a third basic element (50C) for forming a third arcuate area distribution, and fourth basic element (50D) for forming a fourth arcuate area distribution. Responsive basic elements have mutually different thickness along the light transmitting direction.
申请公布号 HK1140831(A1) 申请公布日期 2016.04.01
申请号 HK20100107130 申请日期 2010.07.26
申请人 NIKON ORPORATION (KABUSHIKI KAISHA NIKON) 发明人 TOYODA, MITSUNORI
分类号 G03F;G02B;G02B19/00;G02B27/00;G02B27/28;G02B27/44;G03F7/20;H01L21/027 主分类号 G03F
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