PELLICLE FRAME AND PELLICLE

摘要

The purpose of the present invention is to provide a pellicle frame which is easy to produce and handle and causing little distortion on a photomask after installation. The present invention also provides a pellicle. The pellicle frame of the present invention comprises a pellicle frame main body having a frame shape; a vertical projection part having the thickness which is 5-30% of the width of the pellicle frame main body along an inner surface of the pellicle frame main body from the side facing the side on which a pellicle membrane of the pellicle frame main body is tensionally installed; and a horizontal projection part having the thickness of 0.3-1 mm and being horizontal to the side on which the pellicle membrane is tensionally installed toward the outside from an end of the vertical projection part.