发明名称 感放射線性樹脂組成物、ポリイミド膜、半導体素子および有機EL素子
摘要 (Object) The present invention provides a radiation-sensitive resin composition for forming a film capable of being patterned and having excellent reliability, a polyimide film, a semiconductor device, and an organic EL device. (Solution) The radiation-sensitive resin includes [A] a polyimide precursor having a constituent unit represented by Formula (1) and [B] a mineral acid generator. In Formula (1), A represents a tetravalent organic group, and B represents a divalent organic group. X^1^ and X^2^ are a group represented by the following Formula (2). A patterned polyimide film is formed by using the radiation-sensitive composition and is used in a semiconductor device or an organic EL device.
申请公布号 JP5895789(B2) 申请公布日期 2016.03.30
申请号 JP20120210139 申请日期 2012.09.24
申请人 JSR株式会社 发明人 一戸 大吾;高松 信博
分类号 G03F7/038;C08G73/10;G03F7/004;G03F7/023 主分类号 G03F7/038
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