Avalanche photodiode operating in geiger mode including a structure for electro-optical confinement for crosstalk reduction, and array of photodiodes

摘要

An avalanche photodiode includes a cathode region and an anode region. A lateral insulating region including a barrier region and an insulating region surrounds the anode region. The cathode region forms a planar optical guide within a core of the cathode region, the guide being configured to guide photons generated during avalanche. The barrier region has a thickness extending through the planar optical guide to surround the core and prevent propagation of the photons beyond the barrier region. The core forms an electrical-confinement region for minority carriers generated within the core.

主权项

1. An avalanche photodiode, comprising:
a body of semiconductor material having a first surface and a second surface, said body including:
a cathode region of a first type of conductivity, forming the first and second surfaces; andan anode region of a second type of conductivity, extending within the cathode region and contacting the cathode region along an interface; a lateral insulating region extending through the body starting from the first surface and surrounding the anode region and at least part of the cathode region, said lateral insulating region comprising:
a barrier region; andan insulating region which surrounds the barrier region; and wherein the cathode region forms an optical guide of a planar type comprising a core region which is arranged between the interface and the second surface and which extends between a minimum depth and a maximum depth and is designed to guide photons; wherein the barrier region extends with a thickness at least equal to said maximum depth so as to surround the core region laterally, the barrier region configured to prevent propagation beyond the barrier region of at least part of the photons coming, in use, from the core region and impinging upon the barrier region; wherein the core region forms an electrical-confinement region for minority carriers generated within the core region.