发明名称 METHOD FOR MANUFACTURING METAL OR METAL OXIDE POROUS THIN FILM HAVING THREE-DIMENSIONAL OPEN NETWORK STRUCTURE THROUGH PORE SIZE ADJUSTMENT IN DRY PROCESS AND METAL OR METAL OXIDE POROUS THIN FILM HAVING THREE-DIMENSIONAL OPEN NETWORK STRUCTURE MANUFACTURED BY SAME
摘要 The present invention relates to a metal or metal oxide porous thin film having a three-dimensional open network structure, which is used for a gas sensor, a biosensor, a battery capacitor, a fuel cell, a solar cell, a chemical catalyst, an antibiotic filter, etc., and, more particularly, to a metal or metal oxide porous thin film having a three-dimensional open network structure, which is manufactured through a dry process, not a wet process, and which has mesopores, and a method for manufacturing the same.
申请公布号 WO2016043481(A1) 申请公布日期 2016.03.24
申请号 WO2015KR09620 申请日期 2015.09.14
申请人 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY 发明人 LEE, HO NYUN;KIM, HYUN JONG
分类号 C23C14/24;C23C14/14 主分类号 C23C14/24
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