MICROLENS ARRAY SUBSTRATE

摘要

A microlens substrate has a tendency to warp when an oxide film is formed and annealed before forming a mask in order to adjust the etching rate of wet etching. A film exerting a stress that cancels out this warping may be formed upon a microlens. This film functions as an optical path length adjusting layer.

主权项

1. A microlens array substrate comprising:
a substrate; an oxide film that has an aspheric-surfaced recess is disposed on the substrate, the aspheric-surfaced recess has a tapered edge; a microlens that has a higher refractive index than the substrate is disposed in the aspheric-surfaced recess, the microlens has a convex surface side and flat surface side opposite the convex surface side; and an optical path length adjusting layer is disposed on the flat surface side of the microlens, wherein the substrate is warped in a concave shape by stress from at least one of the oxide film or the microlens, the optical path length adjusting layer includes a first film and a second film, the first film receives a compressive stress in a direction orthogonal to a normal direction of the substrate, and the second film receives a tensile stress in the direction orthogonal to the normal direction of the substrate.