THIN FILM TRANSISTOR ARRAY SUBSTRATE AND MANUFACTURING METHOD FOR THE SAME AND DISPLAY

摘要

Disclosed are a thin film transistor array substrate, a manufacturing method thereof, and a display device. According to an embodiment of the present invention, the thin film transistor array substrate comprises at least one thin film transistor. The thin film transistor comprises: a semiconductor layer having a source region and a drain region having a first doping concentration on a substrate, a channel region which is arranged between the source region and the drain region and has a second doping concentration, and an undoped region extended from the source region and the drain region; a gate insulation film on the semiconductor layer; a gate electrode arranged on the gate insulation film, wherein at least a portion thereof overlaps the channel region; and a source electrode and a drain electrode insulated from the gate electrode and electrically connected to the source region and the drain region. The second doping concentration is lower than the first doping concentration.