| 摘要 |
PROBLEM TO BE SOLVED: To provide a jig which can break a substrate having a functional region without causing position deviation when breaking the substrate.SOLUTION: A substrate 10 is installed on a base 20 having a projection 21. A surrounding of the substrate 10 is held by a frame-like member 40 having an opening 41 corresponding to the substrate 10 and a holding member 50 having comb-like parts 52a-53b above the frame-like member 40. Accordingly, brake precisely completes without causing positional deviation and floating of the substrate at the time of breaking.SELECTED DRAWING: Figure 3A |
