发明名称 ELECTRONIC DEVICE, AND METHOD OF FABRICATING THE SAME
摘要 Disclosed is an electronic device manufacturing method comprising: a step of preparing a support substrate; a step of generating a sacrificial layer by providing graphene oxide on the support substrate; a step of forming a base substrate on the sacrificial layer; and a step of separating the base substrate from the support substrate by thermally treating and pyrolyzing the sacrificial layer. The purpose of the present invention is to provide an electronic device manufacturing method to facilitate the reuse of the support substrate.
申请公布号 KR20160031659(A) 申请公布日期 2016.03.23
申请号 KR20140121316 申请日期 2014.09.12
申请人 IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) 发明人 HAN, TAE HEE;PARK, JIN SEONG;PARK, HUN;NOH, SUNG HYUN
分类号 H01L51/56;C01B31/04;H01L27/32 主分类号 H01L51/56
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