Methods of manufacturing large-area sputtering targets using interlocking joints

摘要

In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding.

主权项

1. A joined sputtering target comprising:
two sputtering-target tiles (A) each comprising a sputtering material, and (B) at least partially joined together via a mechanical joint at an interface therebetween, the mechanical joint comprising portions of the sputtering-target tiles either (i) overlapping each other or (ii) overlapping and interlocking each other at the interface; and a region of metal powder disposed over the interface and in contact with the two sputtering-target tiles.