METHOD FOR THE DECOUPLED CONTROL OF THE QUADRATURE AND THE RESONANCE FREQUENCY OF A MICRO-MECHANICAL ROTATION RATE SENSOR BY MEANS OF SIGMA-DELTA-MODULATION

摘要

A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (uT, UT,0), a quadrature variable (uc, UC,0) and a restoring variable (uS).