Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and ultrasonic sensor

摘要

A liquid ejecting head which includes a piezoelectric element which includes a first electrode, a piezoelectric layer which is provided on the first electrode, and on which a plurality of piezoelectric films are laminated, a second electrode which is provided on the piezoelectric layer, and a plurality of active units which are interposed between the first electrode and the second electrode, and a pressure generating chamber which communicates with nozzle openings which eject liquid, and in which a pressure fluctuation is generated by the piezoelectric element, in which a plurality of grooves with inner faces facing the first electrode side are formed on a side surface of the piezoelectric layer on each interface of each of the piezoelectric films along a first direction and a second direction which cross a third direction which goes from the first electrode to the second electrode.

主权项

1. A liquid ejecting head comprising:
a piezoelectric element including a first electrode, a piezoelectric layer which is provided on the first electrode and on which a plurality of piezoelectric films are laminated, a second electrode which is provided on the piezoelectric layer, and a plurality of active units which are interposed between the first electrode and the second electrode, wherein the second electrode is common to multiple piezoelectric elements; and a pressure generating chamber which communicates with nozzle openings which eject liquid, and in which a pressure fluctuation is generated by the piezoelectric element, wherein a plurality of grooves with inner faces facing the first electrode side are formed on a side surface of the piezoelectric layer on each interface of each of the piezoelectric films along a direction which crosses a direction which goes from the first electrode to the second electrode, wherein the second electrode is formed on the side surface of the piezoelectric layer, wherein the second electrode is deposited to continuously cover an inside surface of the plurality of grooves, and wherein each of the plurality of grooves has a similar shape and orientation.