| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device the cost of which can be reduced.SOLUTION: The inspection device includes a main shaft motor, a stepping motor and a holder 61. The holder 61 includes a holder part 60, an opening/closing part 79 and a weight part 900. The holder part 60 includes a mounting part to/from which an inspection chip 2 can be attached/detached through a holder opening part. The main shaft motor rotates the holder part 60 around a first shaft center to make centrifugal force act on the holder part 60. The stepping motor rotates the holder part 60 around a second shaft center A2 crossing the first shaft center. The opening/closing part 79 is provided at the holder part 60 and opens/closes at least a part of the holder opening part. The weight part 900 is provided on the opposite side from the opening/closing part 79 with respect to the second shaft center A2 in the holder part 60.SELECTED DRAWING: Figure 10 |
