Microwave introducing mechanism, microwave plasma source and microwave plasma processing apparatus

摘要

The microwave introducing mechanism includes an antenna unit having a planar antenna radiating a microwave into a chamber; a tuner for performing impedance matching; and a heat dissipation device for dissipating a heat from the antenna unit. The tuner has a tuner main body including a tubular outer conductor and a tubular inner conductor to serve as a part of a microwave transmission line; slugs provided between the outer conductor and the inner conductor to be movable along a longitudinal direction of the inner conductor; and a driving device for moving the slugs. The heat dissipation device has a heat pipe configured to transfer the heat of the antenna unit from its heat input end to its heat dissipation end.

主权项

1. A microwave introducing mechanism, provided in a microwave transmission line through which a microwave outputted from a microwave output unit of a microwave plasma source is transmitted, for introducing the microwave into a chamber, the microwave plasma source being configured to generate a microwave plasma in the chamber, the mechanism comprising:
an antenna unit including a planar antenna configured to radiate the microwave into the chamber through the microwave transmission line; a tuner provided in the microwave transmission line to adjust an impedance of the microwave transmission line; and a heat dissipation device configured to dissipate a heat from the antenna unit, wherein the tuner includes:
a tuner main body having a tubular outer conductor and a tubular inner conductor coaxially provided in the outer conductor, the tuner main body serving as a part of the microwave transmission line;a slug provided between the outer conductor and the inner conductor to be movable along a longitudinal direction of the inner conductor, the slug having an annular shape and being made of a dielectric material; anda driving device configured to move the slug, wherein the driving device includes a sliding member being inserted into the slug and sliding along the inside of the inner conductor while being brought into contact with an inner circumference surface of the inner conductor, the sliding member having a screw hole, andwherein the heat dissipation device includes:a heat pipe, having a heat input end and a heat dissipation end, configured to transfer the heat of the antenna unit from the heat input end to the heat dissipation end by disposing the heat input end in the antenna unit; anda heat dissipation unit provided at the heat dissipation end of the heat pipe to dissipate the heat transferred to the heat dissipation end.