| 摘要 |
PROBLEM TO BE SOLVED: To provide a power supply unit in which electric energy used in plasma generation is efficiently utilized and thermal damage in a plasma light source and a failure in a circuit are suppressed.SOLUTION: A power supply unit 10 for a plasma light source 20 that repeatedly generates plasma by discharge between electrodes 22, 24 includes: an electric energy supply section 11 storing electric energy and supplying electric energy having been stored to the electrodes 22, 24 of the plasma light source 20; and an electric energy recovery section 13 recovering a part of electric energy flowing in plasma and restoring recovered electric energy in a power storage part 12 of the electric energy supply section 11.SELECTED DRAWING: Figure 1 |
