SUBSTRATE PROCESSING APPARATUS

摘要

Disclosed is a substrate processing apparatus. According to the substrate processing apparatus of the present invention, an adapter is detachably coupled and attached to a plate, and feeding line which is connected to a side of a radio frequency (RF) power source is also connected and attached to the adapter, allowing a user replace only the feeding line or the adapter including the feeding line when the feeding line or the feeding line-connected adapter is damaged, Thus, it is possible to reduce costs and time required for the maintenance of the substrate processing apparatus.