发明名称 METHOD FOR ELECTRONIC CIRCUIT ASSEMBLY ON A PAPER SUBSTRATE
摘要 A methodology for a thin, flexible substrate having integrated passive circuit elements, and the resulting device are disclosed. Embodiments may include integrating one or more passive circuit components on a first or second surface of a substrate, and interconnecting one or more integrated circuit (IC) dies on a second surface of the interposer to the one or more passive circuit components with one or more metal-filled vias between the first and second surfaces, the first and second surfaces being opposite surfaces of the substrate.
申请公布号 US2016064354(A1) 申请公布日期 2016.03.03
申请号 US201414471620 申请日期 2014.08.28
申请人 GLOBALFOUNDRIES INC. 发明人 CHADDA Saket;ALAPATI Ramakanth;BEECE Adam
分类号 H01L25/065;H01L25/00 主分类号 H01L25/065
代理机构 代理人
主权项 1. A method comprising: integrating one or more passive circuit components on a first surface of a substrate; and interconnecting one or more integrated circuit (IC) dies on the first or a second surface of the substrate to the one or more passive circuit components with one or more metal-filled vias between the first and second surfaces, wherein the first and second surfaces are opposite surfaces of the substrate, and wherein the substrate is formed from a carbon-based or metal-based material different from silicon (Si) and FR4 and which has a coefficient of thermal expansion (CTE) matched to that of Si, and by depositing alumina or a multilayer dielectric that has low permeability to oxygen and moisture on a paper substrate, by atomic layer deposition (ALD).
地址 Grand Cayman KY