发明名称 |
METHOD FOR ELECTRONIC CIRCUIT ASSEMBLY ON A PAPER SUBSTRATE |
摘要 |
A methodology for a thin, flexible substrate having integrated passive circuit elements, and the resulting device are disclosed. Embodiments may include integrating one or more passive circuit components on a first or second surface of a substrate, and interconnecting one or more integrated circuit (IC) dies on a second surface of the interposer to the one or more passive circuit components with one or more metal-filled vias between the first and second surfaces, the first and second surfaces being opposite surfaces of the substrate. |
申请公布号 |
US2016064354(A1) |
申请公布日期 |
2016.03.03 |
申请号 |
US201414471620 |
申请日期 |
2014.08.28 |
申请人 |
GLOBALFOUNDRIES INC. |
发明人 |
CHADDA Saket;ALAPATI Ramakanth;BEECE Adam |
分类号 |
H01L25/065;H01L25/00 |
主分类号 |
H01L25/065 |
代理机构 |
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代理人 |
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主权项 |
1. A method comprising:
integrating one or more passive circuit components on a first surface of a substrate; and interconnecting one or more integrated circuit (IC) dies on the first or a second surface of the substrate to the one or more passive circuit components with one or more metal-filled vias between the first and second surfaces, wherein the first and second surfaces are opposite surfaces of the substrate, and wherein the substrate is formed from a carbon-based or metal-based material different from silicon (Si) and FR4 and which has a coefficient of thermal expansion (CTE) matched to that of Si, and by depositing alumina or a multilayer dielectric that has low permeability to oxygen and moisture on a paper substrate, by atomic layer deposition (ALD). |
地址 |
Grand Cayman KY |