MEASURING DEVICE WITH A MICRO-ELECTROMECHANICAL CAPACITIVE SENSOR

摘要

A measuring device has a micro-electromechanical capacitive sensor which has electrodes which move toward and away from each other for measurement of a mechanical deflection of a test mass. The measuring device has a charge integrator which has an operating amplifier which has at least one amplifier input connected to the sensor and an amplifier output which is fed back to the amplifier input via an integration capacitor. The amplifier input is connected via a high-resistance electrical resistor to a terminal for an electrical common-mode reference potential. In addition to the amplifier input, the operating amplifier has an auxiliary input. The amplifier output is connected to the auxiliary input via a deep pass.