基板処理装置および基板処理方法,申请号JP20120035785-传众专利搜索

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发明名称	基板処理装置および基板処理方法
摘要
申请公布号	JP5875405(B2)	申请公布日期	2016.03.02
申请号	JP20120035785	申请日期	2012.02.22
申请人	株式会社ＳＣＲＥＥＮホールディングス	发明人	谷口和隆;上田邦夫
分类号	H01L21/66;G01B11/30;G01N21/956;G06T1/00	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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