Electro-optical modulator and method for making thereof

摘要

A low-voltage optical modulator includes a substrate, a waveguide, a first pair of electrodes, and a second pair of electrodes. The waveguide is diffused into the top surface of the substrate, into a major branch and a parallel modulating branch. A structure of the first and second pair of electrodes are same. The first pair of electrodes includes a first and a second electrode parallel to each other. The first electrode is formed on the modulating branch and the second electrode is opposite to the modulating branch and away from the major branch. The second pair of electrodes includes parallel third and fourth electrodes. The third electrode is formed on the major branch. The fourth electrode is opposite to the major branch and away from the modulating branch.

主权项

1. An electro-optic modulator, comprising:
a substrate comprising a top surface; a Y-shaped waveguide formed on the substrate and comprising a major branch and a modulating branch parallel to the major branch; a first pair of electrodes comprising a first electrode and a second electrode parallel to the first electrode; and a second pair of electrodes comprising a third electrode and a fourth electrode parallel to the third electrode; wherein the first pair of electrodes have a same structure as the second pair of electrodes; the first electrode formed on the modulating branch and a length of the first electrode is equal to a length of the modulating branch; the second electrode is opposite to the modulating branch away from the major branch; the third electrode formed on the major branch and a length of the third electrode is equal to a length of the major branch; the fourth electrode is opposite to the major branch and away from the modulating branch; the first electrode and the fourth electrode are electrically connected to a modulating power supply, the second electrode and the third electrode are grounded; wherein the Y-shaped waveguide comprising an input section and an output section; the major branch and the modulating branch diverge from the input section and converge into the output section; the major branch, the input section, and the output section formed a straight transmission channel; the modulating branch is substantially parallel with the major branch; wherein the Y-shaped waveguide further includes an input branch and an output branch; one end of the input branch is connected with the major branch and the input section, another end of the input branch is connected with the modulating branch; an angle between the output branch and the major branch is the same with an angle between the input branch and the major branch.