| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress residual vibration of a mounting mechanism even when an operation distance changes, by appropriately adjusting a time depth of acceleration and deceleration operation time according to an operation distance of a drive stage and a natural frequency that is a main factor of the residual vibration generated at the mounting mechanism. <P>SOLUTION: An effect of residual vibration in each of at least two operation modes, such as operation modes in which an effect of the residual vibration of the whole apparatus is dominant and in which an effect of the residual vibration of a mounting mechanism 37 is dominant, is substantially suppressed. More specifically, acceleration and deceleration time of the mounting mechanism is made to coincide with a vibration period of the residual vibration. <P>COPYRIGHT: (C)2013,JPO&INPIT |
