发明名称 Increasing signal to noise ratio for creation of generalized and robust prediction models
摘要 A computer system iteratively executes a decision tree-based prediction model using a set of input variables. The iterations create corresponding rankings of the input variables. The computer system generates overall variables contribution data using the rankings of the input variables and identifies key input variables based on the overall variables contribution data.
申请公布号 US9275334(B2) 申请公布日期 2016.03.01
申请号 US201313856288 申请日期 2013.04.03
申请人 Applied Materials, Inc. 发明人 Sharma Deepak;Armer Helen R.;Moyne James
分类号 G06N5/02;G06F15/18;G06N99/00;G05B19/00;G06F17/50 主分类号 G06N5/02
代理机构 Lowenstein Sandler LLP 代理人 Lowenstein Sandler LLP
主权项 1. A method comprising: creating a plurality of sets of rankings of a plurality of input variables by executing a decision tree-based prediction model for a plurality of iterations using the plurality of input variables, the plurality of iterations corresponding to the plurality of sets of rankings, the plurality of input variables being based on data from at least one semiconductor manufacturing tool; generating overall variables contribution data using the rankings of the plurality of input variables; and identifying a plurality of key input variables from the plurality of input variables based on the overall variables contribution data.
地址 Santa Clara CA US