WAFER CARRIER

摘要

Provided is a wafer carrier. The wafer carrier comprises: a body part which accommodates a wafer and includes first and second layers which are stacked in sequence; a cover which is mounted on the body part; a first air filter which is mounted on the cover; and a second air filter which is mounted on a side of the body part. The second layer is positioned between the first layer and the wafer, and of which one surface facing the wafer is subjected to antistatic treatment.